@dataset{currentDoc,
  author = {Gherman, Raphael},
  title = {Replication data for  "Abrasive-free chemical-mechanical planarization (CMP) of gold for thin film nano-patterning"},
  publisher = {Dataverse de l'Université de Sherbrooke},
  issued = {2024-06-24},
  howpublished = {{\url{https://doi.org/10.5683/SP3/60ZFJP}}}
}